ISSN 2415-1297 (Online)   ISSN 2415-1300 (Print)
 
             
 
Volume : 26 Issue : 4 Year : 2018
 
Characterization of Laser Annealed Se-Implanted GaAs [Med J Islamic World Acad Sci]
Med J Islamic World Acad Sci. 1997; 10(2): 61-66

Characterization of Laser Annealed Se-Implanted GaAs

A. H. Oraby
From Department of Physics, Faculty of Science, Mansoura University, Mansoura, Egypt.

A Q-switched ruby or Nd: Glass laser has been used to anneal Se-implanted GaAs. Differential Hall-effect and sheet-resistivity measurements have been carried out to investigate the electrical properties of the implanted layers as a function of laser energy density and laser wavelength. Electron concentrations greater than 1x1019/cm3 were obtained but mobility values were low. Significant indifussion of Se atoms was observed following laser irradiation. The depth of electrically active layer greatly depends on the laser energy density. A comparison of the measured annealed depth as a function of laser energy density with the theoretically calculated annealed depth is presented.

Keywords: Laser, Laser annealing, GaAs


A. H. Oraby. Characterization of Laser Annealed Se-Implanted GaAs. Med J Islamic World Acad Sci. 1997; 10(2): 61-66

Corresponding Author: A. H. Oraby, Egypt


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